Combinatorial Multilevel Mold Insert Using Micromachining and X-ray Lithography

Fabrication, Assembly, and Testing of Metal-based Microchannel Heat Exchangers

Microsystem technologies are believed to be an important part of the technological foundation upon which the world can continue to improve the standard of living in the twenty-first century. Microelectromechanical systems (MEMS) have been studied intensely for over two decades. Si-based MEMS, fabricated by surface and bulk micromachining techniques derived from IC processing technology, dominat...

Novel Poly-L-Lactides micromachining by X-ray lithography

Three-Dimensional Patterning using Ultraviolet Nanoimprint Lithography

Although an extensive number of publications have been reported on nanoimprint lithography (NIL) techniques, the ability of NIL for three-dimensional (3-D) patterning has not been fully addressed in terms of the mold fabrication and imprint processes. Developing technologies for patterning 3-D and multilevel features are important because they eliminate multiple steps and complex interlevel ali...

Advances in LIGA-based post-mold fabrication

The establishment of a process to allow planarization of deep x-ray lithography based microfabricated metal components via diamond lapping has enabled examination of three additional microfabrication issues. The areas of improvement that are discussed include materials, microassembly and packaging, and multilevel fabrication. New materials work has centered on magnetic materials including preci...

Fabrication of Microfluidic Device for Quantitative Monitoring of Algal Cell Behavior Using X-ray LIGA Technology

In this paper, a simple microfluidic device for monitoring algal cell behavior is proposed. An array of algal microwells is fabricated by PDMS soft-lithography using X-ray LIGA mold, placed on a glass substrate. Two layers of replicated PDMS and substrate are attached by oxygen plasma bonding, creating a microchannel for the microfluidic system. Algal cell are loaded into the microfluidic devic...